MEMS DESIGN SYNTHESIS AND OPTIMIZATION

Ying Zhang, Raffi Kamalian, Alice M. Agogino (11/2004)


The goal of this project is to create useful, efficient design synthesis tools for MEMS devices. Design synthesis helps engineers develop rapid, optimal configurations for a given set of performance and constraint guidelines. So far, a hierarchical MEMS synthesis and optimization architecture has been developed, which integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms (GA) and local gradient-based refinement. Test resonators generated from the GA process with the SUGAR simulation tool as a simulation engine have been fabricated and characterized, which validated the GA synthesis algorithm. The best GA designs have been refined using gradient optimization technique. The performance of some designs could be improved up to 15%. In the design library, an object-oriented data structure is used to represent hierarchical levels of elements and their connectivity. Additionally, all elements encapsulate instructions and restrictions for genetic operations (mutation, crossover). The parameterized component library includes distinct low-level functional elements and high level clusters, which are composed of primitive elements. This component library will be further developed into a MEMS design case library.

 
Ying Zhang
 

A COMPARISON OF MEMS SYNTHESIS TECHNIQUES

R. Kamalian, N. Zhou, A. M. Agogino (7/2002)


The goal of design synthesis is to help engineers develop rapid, optimal configurations for a given set of performance and constraint guidelines. Recent results in the development of synthesis tools for MEMS will be presented as part of the foundation for a larger research program aimed at developing a practical synthesis tool that can create both the topology and sizing of MEMS devices.

Multi-objective Genetic Algorithms (MOGA) have been successfully implemented for MEMS design in previous research [1]. This method was chosen because of its generality, robustness and ability to optimize for multiple design goals. MOGA uses an evolutionary approach to developing a population of optimal solutions: Given a higher-level description of the device’s desired behavior, an initial population of candidate designs is generated randomly from a number of available components such as anchors, beams, electrostatic gaps, combs and springs. Each design is checked for geometrical validity and its performance is evaluated. MOGA is then applied to the initial population to iteratively search for functional designs by applying the genetic operations of selection, elitism, crossover and mutation to create the next generation of designs. This process continues until an optimum group of "pareto optimal" solutions is synthesized. The modified nodal analysis (MNA) tool SUGAR is used to evaluate the performance of the MEMS design. The use of SUGAR's much quicker MNA method, rather then the relatively slow finite element simulation, is critical to its computational tractability [2]. We will summarize results using MOGA to synthesize MEMS devices and subassemblies with a variety of combinations of performance objectives.

As part of our evaluation of MEMS synthesis techniques, we will contrast MOGA against Simulated Annealing (SA) optimization. As the name implies, SA exploits an analogy between the way in which a heated metal cools into a minimum energy state and a stochastic optimization algorithm that slowly “lowers the temperature” in stages to eventually “freeze” at the global optimum. SA randomly perturbs a given initial design, whose variations are accepted as the new design with a threshold probability which decreases as the computation proceeds. The slower the rate of probability decrease, the more likely the algorithm is to find an optimal or near-optimal solution. Simulated annealing will be compared to the genetic algorithm approach in terms of robustness, effectiveness and speed. The research will be framed within a larger research program for developing general-purpose MEMS synthesis tools, including a case-based library for initial device designs.

References

1. N. Zhou, B. Zhu, A.M. Agogino, K.S.J. Pister, “Evolutionary Synthesis of MEMS (Microelectronic Mechanical Systems) Design”. Proceedings of ANNIE 2001, Intelligent Engineering Systems through Artificial Neural Networks, Volume 11, ASME Press, pp. 197-202.

2. J.V. Clark, D. Bindel, N. Zhou, J. Nie, W. Kao, E. Zhu, A. Kuo, K.S.J. Pister, J. Demmel, S. Govindjee, Z. Bai, M. Gu, and A.M. Agogino, “Addressing the Needs of Complex MEMS Design”, Proceedings of the 15th IEEE MEMS Conference, Las Vegas, January 20-24, 2002, pp 204-209.

Raffi Kamalian